Material Synthesis/Deposition
![<span class='text-lg font-[500]'>Thermal CVD1</span>](/_next/image?url=%2F_next%2Fstatic%2Fmedia%2FThermal_CVD1.dfafb89d.webp&w=3840&q=75)
Thermal CVD1
2D material growth
Ga2O3 growth
![<span class='text-lg font-[500]'>Thermal CVD2</span>](/_next/image?url=%2F_next%2Fstatic%2Fmedia%2FThermal_CVD2.c4d5f3c0.webp&w=3840&q=75)
Thermal CVD2
Ga2O3 growth
![<span class='text-lg font-[500]'>Atomic Layer Deposition System</span>](/_next/image?url=%2F_next%2Fstatic%2Fmedia%2FAtomic_Layer_Deposition_System.fac82ac2.webp&w=3840&q=75)
Atomic Layer Deposition System
Passivation layers (Al2O3)
SnO2 coating layer
![<span class='text-lg font-[500]'>Electric box furnace1</span>](/_next/image?url=%2F_next%2Fstatic%2Fmedia%2FElectric_box_furnace1.ccb86302.webp&w=3840&q=75)
Electric box furnace1
1400 C
![<span class='text-lg font-[500]'>Electric box furnace2</span>](/_next/image?url=%2F_next%2Fstatic%2Fmedia%2FElectric_box_furnace2.ecea4434.webp&w=3840&q=75)
Electric box furnace2
900 C, ambient control
Materials Characterizations
![<span class='text-lg font-[500]'>UV-Vis spectrometer</span>](/_next/image?url=%2F_next%2Fstatic%2Fmedia%2FUV-Vis_spectrometer.80d97aa2.webp&w=3840&q=75)
UV-Vis spectrometer
More characterization tools in the shared facility
Room temperature Hall measurement
X-ray diffractometer
Secondary electron microscopy
Atomic force microscopy
X-ray photoemission spectroscopy
Transmission electron microscopy
Raman spectroscopy